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Chamber Cleaning with Advanced Energy Remote Plasma Sources
In this video, learn how Advanced Energy's MAXstream remote plasma source (RPS) is used in CVD chamber cleaning. Extending AE’s leadership in process power, MAXstream delivers reliable performance across a broad range of flow rates, increasing productivity in semiconductor process equipment.
Remote Plasma Sources
MAXstream
Reliable, High-Performance Remote Plasma Source for Chamber Clean Applications
Advanced Energy’s MAXstream line is the next generation of remote plasma sources for chamber cleaning. With flow capabilities of 3 to 12 standard liters per minute (SLPM) and industry-leading power control, MAXstream RPS provides a compact solution for chamber clean, and with AE’s proven RPS reliability, long life trouble-free operation.
- Highly reliable plasma cleaning systems for trouble-free operation
- Proprietary high-purity aluminum substrate with Type 3 anodization for longer chamber life
- Unique dual ignition core design ensures virtually 100% ignition reliability
- Industry-leading power control for consistent, repeatable performance
- Overview
- Technical Specs
- Documents
- Service & Support
- Distributors
Overview
Advanced Energy’s MAXstreamTM line is the next generation of remote plasma sources for chamber cleaning. The MAXstream is available in 3, 6, 8, 10, and 12 SLPM NF3 flow rates to optimize price and performance.
Ensuring long chamber life and low particle generation, AE brings its proven and differentiated plasma source materials and technology. The unique dual ignition core design delivers best-in-class plasma ignition reliability. Featuring a reliable and strike-every-time ignition, MAXstream RPS offers more consistent operation and less downtime for RPS maintenance.
The MAXstream RPS facilitates drop-in compatibility with traditional RPS systems, simplifying design-in compatibility as well as enabling seamless field upgrades to a new reliable and repeatable solution.
Benefits
- Enable customers to optimize cost via multiple flow options
- Save valuable tool space with a smaller footprint than Xstream RPS
- Achieve virtually 100% ignition reliability with unique AE dual ignition cores
- Increase chamber life with AE proprietary high purity aluminum substrate with Type 3 anodization
- Reduce cleaning time with up to 12 SLPM flow capabilities
Features
- Five models: MAXstream 300 for low flow applications and MAXstream 600, 800, 1000, 1200 for higher flow applications
- Highly reliable RPS maximizes tool uptime
- Drop-in capability with traditional RPS units for an easy design upgrade path to higher performance and reliability
- Enhanced cooling of plasma source walls to reduce damage from thermal expansion and chemical erosion
- Active monitoring and control of plasma power for industry-leading power control
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Plasma Power Range
300 to 12,000 W, continuous
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Ignition
MAXstream 300
100 mTorr to 4 Torr up to 2 SLM of Ar, <1% poisoned by NF3
MAXstream 600, 800, 1000, 1200
100 mTorr to 4 Torr of Argon up to 1 SLPM
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Power Accuracy
±5% or 50 W, whichever is greater
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Flow Range
MAXstream 300
Up to 3 SLPM at 10 Torr
MAXstream 600, 800, 1000, 1200
Up to 12 SLM at 30 Torr
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Input Voltage
MAXstream 300
187 to 229 VAC, no neutral, 3 phase with PE ground (phase insensitive)
MAXstream 600, 800, 1000, 1200
200 to 208 VAC ±10% (180 to 229 VAC), no neutral, 3 phase with PE ground (phase insensitive)
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546
Email
Thin Film Support
Thermal Product Support
Other Technical Support
Find an AE Representative or Distributor
To find distributors and representatives who sell AE products in your area, select your location and vendor type (optional).
Compare Products
Model
MAXstream 300
MAXStream 600, 800, 1000, 1200
300 to 6000 W
500 to 12,000 W
±5% or 50 W, whichever is greater
±5% or 50 W, whichever is greater
Up to 3 SLPM at 10 Torr
Up to 12 SLPM at 30 Torr
100 mTorr to 4 Torr up to 2 SLPM
100 mTorr to 4 Torr of Argon up to 1 SLPM
25.4 x 21 x 42.4 cm (10 x 8.3 x 16.7 in)
26.3 x 24.1 x 43.4 cm (10.3 x 9.5 x 17.1 in)