Plasma Power Generators
eVerest
Angstrom-Era Precision Power
The eVerest™ RF Power Delivery System empowers process innovation for the next technology node with dynamically controllable multi-level pulsing, increased stability range, and high-speed controls.
• Enables novel process development for < 2 nm deposition and etch profiles
• Provides reliable ignition with RF stability independent of cable length
• Integrates seamlessly into any plasma system
• Increases process space and widens stability window
• Backed by worldwide product and application support from local service centers
- Overview
- Technical Specs
- Documents
- Service & Support
- Distributors
Overview
As the semiconductor industry speeds toward a new inflection, the eVerest™ RF generator fills the need for transformational plasma control. Its configurable multi-level pulsing enables instantaneous or user-defined transition timing. Additionally, high-speed, high-accuracy model-based frequency tuning with wide frequency sweep range provides greater process stability and control. These capabilities, plus faster setpoint response, controlled overshoot at the beginning of pulsing states, and sophisticated PowerInsight by Advanced Energy™ IoT intelligence empower process innovation for the next technology node.
Benefits
• Enables novel process development for < 2 nm deposition and etch profiles
• Provides reliable ignition with RF stability independent of cable length
• Integrates seamlessly into any plasma system
• Increases process space and widens stability window
• Backed by worldwide product and application support from local service centers
Features
• Full RF delivery system, multiple options for matching solutions, and intelligent synchronization
• Speed and control within programmable multi-level pulse profiles
• High-speed RF output response and pulse-state rise/fall times
• Up to ±10% frequency tuning range
• Designed-in dP/dZ stability
• PowerInsight by Advanced Energy™ IoT ecosystem
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RF Output Power
3.5 to 10 kW
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Frequencies
1 to 60 MHz
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Power Accuracy into 50 Ω
± 1 W or ± 1% of setpoint, whichever is greater
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Auto Frequency Tuning
Available
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Pulse State Time
11 μsec to 250 msec
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Available Communication Interfaces
EtherCAT®, RS-232, Ethernet
Data Sheets
Brochures
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546
Email
Thin Film Support
Thermal Product Support
Other Technical Support
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