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Plasma Power Generators
eVoS™ Asymmetric Bias Waveform Generator
Direct Control of Substrate Voltage and Ion Energy Distribution
The AE's eVoS™ platform enables direct control of wafer-surface voltage and ion energy distribution, empowering process engineers to optimize bias performance for specific process results.
- Customized ion energy distribution maximizes concentration to process-optimal levels.
- Independently regulated voltage and current output enhances control of bias conditions.
- Proprietary control system enables direct manipulation of wafer-bias characteristics.
- Fast, digitized metrology provides real-time output monitoring and control.
- Overview
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Overview
Shrinking chip dimensions and high-aspect-ratio structures demand exacting control of ion energy. With the eVoS™ platform, AE introduces a paradigm shift in bias technology. By maximizing the ability to tailor ion energy, eVoS enables precise command of etch and deposition geometries at very small dimensions. Direct control of wafer-surface voltage and ion energy distribution (IED) empowers process engineers to optimize bias performance for specific process results, ensuring sensitive feature formation. In addition, fast digital metrology and novel control algorithms enable the production of narrower IEDs compared to alternative technologies. These capabilities change what’s possible in plasma processing.
Benefits
• Improved process control
• Direct control of wafer bias voltage and resulting ion energies
• Narrow ion energy distributions
• High-precision ion energy selection
• Improved etch rate with less input power
• Streamlined system design and integration
Features
• Real-time bias voltage and ion current feedback
• Optimized waveform for ion energy control
• High-speed metrology
• Multi-level pulsing with fast DC-level response
• Input and output signals for pulse synchronization
• EtherCat® communication
• High efficiency
Global Support & Services
Maximize fab productivity and capital equipment ROI with world-class support through each product lifecycle stage — from startup to long-term operation. Our service offerings are based on more than three decades of precision power and applications expertise.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546
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