Agile, Precise Power Delivery for Demanding High-Speed Matching Applications

The Navigator^® II FCi is a standalone, microprocessor-controlled impedance matching network. Incorporating tuning elements adjusted by discrete solid-state switched capacitor arrays, the matching network is driven by the need to achieve fast, ac­curate tuning across wider impedances. With a similar form, footprint, and tuning ranges as traditional counterparts, these matches offer tuning times in the millisecond range compared with the one-second range typical of traditional matching networks. This high-speed matching technology is optimized and suited for critical, power sensitive, short duration plasma process steps such as Atomic Layer Etch (ALE).

When configured for full-range tuning, the Navigator FCi can cover an impedance space identical to that of a vacuum capacitor match. The com­pactness of solid-state circuitry allows the match to fit within a similar footprint of the conventional version. This match has no moving mechanical parts, eliminating wear and drift mechanisms inherent to traditional matches. This enables higher reliability and repeatability on a broad range of challenging and continually varying plasma processes.