- Products
- Plasma Power Generators
- RF Plasma Generators
- Paramount Plus
Plasma Power Generators
Paramount Plus
Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications
Paramount Plus offers progressive technology and customizable features that include premier pulsing control.
- Precise RF and pulse control
- Fast response to plasma changes
- Built-in diagnostic tools
- Overview
- Technical Specs
- Documents
- Service & Support
Overview
Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 1 to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.
Benefits
- Precisely control RF
- Enhance plasma stability
- Expedite plasma transitions
- Reduce process times
- Improve process repeatability and chamber matching
Features
- Enhanced RF stability with tightly regulated power output
- Advanced multi-level pulsing
- Pulse synchronization and monitoring
- Real-time power and impedance measurement
- Advanced FastDAQ data acquisition system
-
Power Level
Paramount Plus MF
5 and 15 kW
Paramount Plus VHF
5 to 15 kW
-
Frequencies
Paramount Plus MF
2 MHz, frequency tuning ± 10%
Paramount Plus VHF
27 MHz, 40 MHz, 60 MHz, frequency tuning ± 5%
-
Available Interfaces
RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT
-
AC Input
Paramount Plus MF
200/240 VAC, 400/480 VAC
Paramount Plus VHF
200/240 VAC, 400/480 VAC
-
Line Frequency
50/60 Hz
-
Cooling
Air and water
-
Operating Ambient Temperature Range
+5°C to +40°C, +41°F to +104°F
-
Advanced Features
Multi-level pulsing, arc management, CEX
Specifications are subject to change without notice. Not all options and accessories are available for all models and configurations. Dimensions listed generally refer to standard configurations and module bodies only. Please confirm technical specifications and customizations with a sales representative. Advanced Energy is not responsible for errors or omissions.
Data Sheets
Brochures
Application Notes
Global Support & Services
Advanced Energy offers regular calibration of your RF generators and matches. Trust our experts to keep your precise RF sensors within specification and ensure your tools are operating at their highest potential.
Applications Support & Consulting
Accelerate tool installations and process development programs, or address specific applications concerns with Advanced Energy's dedicated applications consultants and engineering staff. Benefit from on-site reviews, analyses, and consultations.
Warranties
Decrease variability in maintenance costs and provide additional cost protection. Advanced Energy offers whole-box extended warranties.
Product Support
Call
U.S.: +1 800 446 9167
Asia: +86 29 8874 1895
China: 400 8899 130
EMEA: +44 800 032 1546
U.K.: 08000 321 546
Email
Thin Film Support
Thermal Product Support
Other Technical Support