Search results for "Remote Plasma Sources"
Products
Remote Plasma Sources
Remote plasma source solutions from Advanced Energy equip your manufacturing and abatement processes with high functionality and exceptional reliability.
Read MorePages
MAXstream Remote Plasma Source Video
Learn how our new reliable, high-performing remote plasma source for chamber clean applications works.
Read MoreResources
Chamber Cleaning with Advanced Energy Remote Plasma Sources
In this video, learn how Advanced Energy's MAXstream remote plasma source (RPS) is used in CVD chamber cleaning. Extending AE’s leadership in process power, MAXstream delivers reliable performance across a broad range of flow rates, increasing productivity in semiconductor process equipment.
Products
MAXstream
Reliable, High-Performance Remote Plasma Source for Chamber Clean Applications
Read MoreProducts
Xstream
High-Quality, Chamber-Clean Remote Plasma Source with Unrivaled Performance
Read MoreResources
Rapid OX RPS Data Sheet
Rapid OX is the ideal remote plasma source for oxygen-based processes.
View ResourceResources
Xstream RPS Data Sheet
Xstream remote plasma source has an active matching network fully integrated plasma source platform for high-flow and high-pressure, reactive-gas processes.
View ResourceResources
MAXStream 600, 800, 1000, and 1200 Data Sheet
The MAXstream 600, 800, 1000, and 1200 are reliable and cost-effective remote plasma source (RPS) solutions for mid-flow (6 to 12 SLPM) NF3 chamber clean applications.
View ResourceResources
MAXstream 300 Data Sheet
The MAXstream 300 is a compact, reliable, and cost-effective remote plasma source (RPS) solution for low flow (2 to 3 SLPM) NF3 chamber clean applications.
View Resource